HTW Germany


HTW Hochtemperatur-
Werkstoffe GmbH

Tel.: +49 (0)8271 81 86 10
Fax: +49 (0)8271 73 72
info@htw-germany.com

Semiconductors

High purity, extreme corrosion resistance, no particle generation, electrical conductivity and good mechanical properties make glassy carbon SIGRADUR® to an ideal material for the semiconductor production. Glassy carbon crucibles and boats are used for zone melting of semiconductor components, gallium arsenide synthesis, and monocrystal growth by the Bridgman or Czochralsky method. Glassy carbon is used for parts in ion implanting systems and electrodes for plasma etching systems due to its extreme resistance. The high X-ray transmission of glassy carbon is advantageous for the X-ray lithography. Glassy carbon wafers are used as substrate materials for X-ray masks.

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